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5140-1/2-316L SS-0.1- Ammonia -0ATM/0ATM

  1. Mott
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Part Number
5140-1/2-316L SS-0.1- Ammonia -0ATM/0ATM
Connection Type
VCR
Surface Mount
Size
1/2"
1/4"
Port Style
N/A
Flow
 SCCM
Gas
Ammonia
Argon
Arsenic Pentafluoride
Arsine
Boron Trichloride
Boron Trifluoride
Carbon Dioxide
Carbon Minoxide
Carbon Tetrachloride
Carbon Tetraflouride
Chlorine
Diborane
Diethyltelluride
Dichlorosilane
Freon 13
Freon 14 Tetrafluoromethane
Freon 23 Trifluoromethane/Fluoro-form
Freon 115 Chloropentafluoroethane
Freon 116 Hexafluoroethane
Fluorine
Germane
Helium
Hydrogen
Hydrogen Selenide
Hydrogen Sulfide
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Fluoride
Krypton
Methane
Methyl Fluoride
Nitric Oxide
Nitrogen
Nitrous Oxide
Neon
Nitrogen Fluoride
Ozone
Oxygen
Perflouropropane
Phosphine
Phosphorus Pentachloride
Phosphorous Pentaflouride
Phosphorous Trifluoride
Silicon Tetrachloride
Silicon Tetrafluoride
Silane
Stibine
Sulfur Hexafluoride
Tetraethyl Orthosilicate
Trimethyl Borane
Trimethyl Phosphate
Trichlorosilane
Tungsten Hexafluoride
Xenon
Inlet Pressure
Inlet Pressure Unit
ATM
Outlet Pressure
Outlet Pressure Unit
ATM
Porous Locations
N/A
Class
10 RA
Material
316L SS
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